Our concept of product R&D for equipment such as clean units, clean ovens, clean benches and air showers is to provide total systems that are environmentally-friendly and energy-efficient.

Air Purification

Air Purification

Clean Units

Able to easily create a clean air space, these clean units range in capacity from 5 to 55 cubic meters per minute.



Air Showers

Air locks are used to separate clean air spaces, such as clean rooms, from general rooms. Types with automatic doors and manual doors are available.

Clean Ovens

Used for heat treatment in clean environments, with a variety of models capable of temperatures ranging up to 350°C.

Humidity Temperature Adjust Cleanhood

With recent increases in the degree of detail, unevenness in glass substrate transfer has become more common. Temperature and humidity control eliminates this problem.